JPS632913B2 - - Google Patents

Info

Publication number
JPS632913B2
JPS632913B2 JP54073614A JP7361479A JPS632913B2 JP S632913 B2 JPS632913 B2 JP S632913B2 JP 54073614 A JP54073614 A JP 54073614A JP 7361479 A JP7361479 A JP 7361479A JP S632913 B2 JPS632913 B2 JP S632913B2
Authority
JP
Japan
Prior art keywords
silicon carbide
aluminum nitride
sintered
sintering
weight percent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54073614A
Other languages
English (en)
Japanese (ja)
Other versions
JPS553396A (en
Inventor
Murata Yorihiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kennecott Corp
Original Assignee
Kennecott Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kennecott Corp filed Critical Kennecott Corp
Publication of JPS553396A publication Critical patent/JPS553396A/ja
Publication of JPS632913B2 publication Critical patent/JPS632913B2/ja
Granted legal-status Critical Current

Links

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  • Ceramic Products (AREA)
JP7361479A 1978-06-15 1979-06-13 Silicon carbideealuminum nitride sintered product and its manugacture Granted JPS553396A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US91566478A 1978-06-15 1978-06-15

Publications (2)

Publication Number Publication Date
JPS553396A JPS553396A (en) 1980-01-11
JPS632913B2 true JPS632913B2 (en]) 1988-01-21

Family

ID=25436090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7361479A Granted JPS553396A (en) 1978-06-15 1979-06-13 Silicon carbideealuminum nitride sintered product and its manugacture

Country Status (1)

Country Link
JP (1) JPS553396A (en])

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59107975A (ja) * 1982-12-08 1984-06-22 旭硝子株式会社 ＳｉＣ質焼結体およびその製法
JPS61266353A (ja) * 1985-05-20 1986-11-26 東芝セラミツクス株式会社 炭化ケイ素質焼結体
JPS61146760A (ja) * 1984-12-17 1986-07-04 東芝セラミツクス株式会社 炭化ケイ素の発熱体
JPS61209954A (ja) * 1985-03-14 1986-09-18 東芝セラミツクス株式会社 炭化珪素質耐火材料の製造方法
JPS62113762A (ja) * 1985-05-20 1987-05-25 東芝セラミツクス株式会社 炭化ケイ素質高強度焼結体
JPS62113761A (ja) * 1985-05-20 1987-05-25 東芝セラミツクス株式会社 高強度焼結体およびその製造方法
JPS627669A (ja) * 1985-07-01 1987-01-14 東芝セラミツクス株式会社 半導体製造用部材

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5919903B2 (ja) * 1976-05-19 1984-05-09 日本特殊陶業株式会社 ＳｉＣ系焼結体のホツトプレス製造方法
DE2809278A1 (de) * 1978-03-03 1979-09-06 Kempten Elektroschmelz Gmbh Dichte polykristalline formkoerper aus alpha-siliciumcarbid und verfahren zu ihrer herstellung durch drucklose sinterung

Also Published As

Publication number Publication date
JPS553396A (en) 1980-01-11

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